DOI: 10.3724/SP.J.1249.2019.02147

Journal of Shenzhen University Science and Engineering (深圳大学学报理工版) 2019/36:2 PP.147-151

Terahertz frequency up-conversion imaging devices

Terahertz (THz) imaging device is one of the key technologies in THz technology applications. A THz frequency up-conversion imaging device made of THz quantum-well photodetectors and light-emitting diode (THz QWP-LEDs) is fabricated by stacking and growing THz QWPs and near-infrared LEDs with molecular beam epitaxy technology. The 45° facet coupler has a peak response of 0.22 A/W at the peak detection frequency of 5.2 THz and a noise equivalent power of 5.2×1012 W/Hz0.5. And the device also has the ability to image the spot of the terahertz quantum cascade laser (THz QCL) clearly. The developed metal grating coupler can achieve normal incidence imaging, effectively reduce the image distortion and is conducive to the preparation of large area devices. The working principle, fabrication method, basic performance and imaging performance of the devices are introduced in detail. The current-voltage characteristics, imaging quality and imaging distortion of the device are discussed. The devices have no need of cryogenic reading integrated circuits and flip-chip package based on pixel-free imaging technology. Therefore, the development of these devices can provide a simple way for high-performance THz imaging.

Key words:semiconductor devices and technology,terahertz,quantum-well,detector,frequency up-conversion,imaging

ReleaseDate:2019-12-02 09:24:37

[1] FU Zhanglong, GU Liangliang, GUO Xuguang, et al. Frequency up-conversion photon-type terahertz imager[J]. Scientific Reports, 2016, 6:25383.

[2] KNIPPER R, BRAHM A, HEINZ E, et al. THz absorption in fabric and its impact on body scanning for security application[J]. IEEE Transactions on Terahertz Science and Technology, 2015, 5(6):999-1004.

[3] ZHOU Zhitao, ZHOU Tao, ZHANG Shaoqing, et al. Multicolor T-ray imaging using multispectral metamaterials[J]. Advanced Science, 2018, 5(7):1700982.

[4] SHI Shengcai, PAINE S, YAO Qijun, et al. Terahertz and far-infrared windows opened at Dome A in Antarctica[J]. Nature Astronomy, 2017, 1(1):0001.

[5] KIM D Y, PARK S, HAN R, et al. Design and demonstration of 820-GHz array using diode-connected NMOS transistors in 130-nm CMOS for active imaging[J]. IEEE Transactions on Terahertz Science and Technology, 2016, 6(2):306-316.

[6] YANG Xiang, ZHAO Xiang, YANG Ke, et al. Biomedical applications of terahertz spectroscopy and imaging[J]. Trends in Biotechnology, 2016, 34(10):810-824.

[7] MITTLEMAN D M. Twenty years of terahertz imaging[J]. Optics Express, 26(8):9417-9431.

[8] CARRANZA I E, GRANT J P, GOUGH J, et al. Terahertz metamaterial absorbers implemented in CMOS technology for imaging applications:scaling to large format focal plane arrays[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2017, 23(4):4700508.

[9] DHILLON S S, VITIELLO M S, LINFIELD E H, et al. The 2017 terahertz science and technology roadmap[J]. Journal of Physics D:Applied Physics 2017, 50:043001.

[10] ROGALSKI A, SIZOV F. Terahertz detectors and focal plane arrays[J]. Opto-Electronics Review, 2011, 19(3):346-404.

[11] 邵棣祥,郭旭光,张戎,等. 多体效应对太赫兹量子阱探测器的影响[J]. 光学学报, 2017, 37(10):1004001. SHAO Dixiang, GUO Xuguang, ZHANG Rong, et al. Influence of many body effect on terahertz quantum well photodetectors[J]. Acta Optica Sinica, 2017, 37(10):1004001.(in Chinese)

[12] ZHANG Rong, SHAO Dixiang, FU Zhanglong, et al. Terahertz quantum well photodetectors with metal-grating couplers[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2017, 23(4):38000407.