DOI: 10.3724/SP.J.1249.2019.02182

Journal of Shenzhen University Science and Engineering (深圳大学学报理工版) 2019/36:2 PP.182-188

Terahertz adjustable metasurface structure based on vanadium dioxide thin film

Based on the insulation-metal phase transition characteristics of vanadium dioxide thin films, an metasurface-based electronically controlled terahertz modulation device is designed and fabricated on a high-resistance silicon substrate. The transmission and electronically controlled tunable characteristics of the metasurface in the terahertz frequency range are studied. The experimental results show that when the terahertz wave is perpendicular to the surface of the tunable metasurface device, the transmission line of the device reaches the highest peak at 0.31 THz. And when the voltage increases from 0 V to 8 V, the transmission rate of the device significantly decreases, and the lowest peak value is at 0.41 THz. The modulation depth can be up to 59% in the entire band of 0.2-0.6 THz. By controlling the applied voltage, the device can switch freely between two resonant states with a large difference in transmittance. The experimental results are of great significance for the research and development of terahertz tunable metasurface.

Key words:electromagnetic field and electromagnetic waves,terahertz,tunable metasurface,amplitude modulation,phase-change material,vanadium dioxide,silicon substrate

ReleaseDate:2019-12-02 09:24:38

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